Tuesday July 23, 2019
1:30PM Sessions
(click the Session Code link to see the Abstracts)
Session CodeRoomSessionType
AA1-TuAGrand Ballroom E-GEmerging Applications IOral
AA2-TuAGrand Ballroom E-GALD for Batteries IIOral
AA3-TuAGrand Ballroom A-CALD for Memory Applications IOral
AF-TuAGrand Ballroom A-CPlasma ALD: Growth and CharacterizationOral
ALE1-TuARegency Ballroom A-CModeling & Instrumentation IOral
ALE2-TuARegency Ballroom A-CModeling & Instrumentation IIOral
AS1-TuAGrand Ballroom H-KArea-Selective ALD by Area-DeactivationOral
AS2-TuA1Grand Ballroom H-KArea-Selective ALD: Combinations with EtchingOral
AS2-TuA2Grand Ballroom H-KLate Breaking AbstractsOral