Wednesday July 24, 2019
8:00AM Sessions
(click the Session Code link to see the Abstracts)
Session CodeRoomSessionType
AA1-WeMGrand Ballroom H-KALD for Memory Applications IIOral
AA2-WeMGrand Ballroom H-KALD for ULSI Applications IOral
ALE1-WeMRegency Ballroom A-CIntegration & Application of ALEOral
ALE2-WeMRegency Ballroom A-CMaterials Selective ALEOral
AM1-WeMGrand Ballroom E-GSpatial ALD, Fast ALD, and Large-Area ALDOral
EM1-WeMGrand Ballroom A-CMolecular Layer DepositionOral
EM2-WeMGrand Ballroom A-COrganic-Inorganic Hybrid MaterialsOral
EM3-WeMGrand Ballroom E-GEpitaxial Growth and III-V MaterialsOral