Technical & Poster Sessions: Wednesday Live (LI3-WeM)
Wednesday, Jul 1 2020 8:30AM, Room Live
Moderated by: Christophe Detavernier, Ghent University, Belgium; Jean-Fran├žois de Marneffe, IMEC, Belgium
Abstracts (Use Expand/Collapse icon in first column to see/hide details)
SchedulePaper #Invited TalkTitle
10:00 AMLI3-WeM-7Welcome & Introduction
10:15 AMLI3-WeM-8Surface Reactions Between Metals and Diketone induced by Gas Cluster Ion Bombardments
10:45 AMLI3-WeM-10ALE 2020 Best Student Paper Award Talk: Isotropic Plasma ALE of Al2O3 using SF6 Plasma and TMA
11:15 AMLI3-WeM-12Monolayer Lithography: Exploiting Inhibition Contrast from the Extreme Ultraviolet Irradiation of Organic Monolayers for Area Selective Depositions
11:45 AMLI3-WeM-14Super-Conformal ALD of Metallic Mo Films by Simultaneous Deposition and Etch
12:15 PMLI3-WeM-16Process Optimization in Atomic Layer Deposition Using Machine Learning
12:30 PMLI3-WeM-17ALD/ALE Student Awards, Closing Remarks, & Sponsor Thank You
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