ALD Plenary Session (PS1-MoM)
Monday, Jul 22 2019 8:30AM, Room Grand Ballroom A-G
Moderated by: Sumit Agarwal, Colorado School of Mines; Dennis Hausmann, Lam Research Corp.
Abstracts (Use Expand/Collapse icon in first column to see/hide details)
SchedulePaper #Invited TalkTitle
8:45 AMPS1-MoM-2Atomic Scale Processing: From Understanding to Innovation
9:30 AMPS1-MoM-5Elucidating the Mechanisms for Atomic Layer Growth through In Situ Studies
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