ALD Fundamentals Sessions
(click the Session Code link to see the Abstracts)
Session CodeSessionTypeTimeRoom
AF1-MoAALD Growth Mechanisms IOralMonday, 01:30 PMGrand Ballroom H-K
AF2-MoAALD Precursors IOralMonday, 01:30 PMGrand Ballroom E-G
AF3-MoAGrowth and Characterization IOralMonday, 01:30 PMGrand Ballroom E-G
AF4-MoAGrowth Mechanisms IIOralMonday, 01:30 PMGrand Ballroom H-K
AF1-MoPPrecursor Synthesis and Process Development Poster SessionPosterMonday, 05:45 PMEvergreen Ballroom & Foyer
AF2-MoPPrecursor Selection and Growth Optimization Poster SessionPosterMonday, 05:45 PMEvergreen Ballroom & Foyer
AF3-MoPGrowth Mechanisms and In Situ Studies Poster SessionPosterMonday, 05:45 PMEvergreen Ballroom & Foyer
AF4-MoPPlasma Enhanced ALD Poster SessionPosterMonday, 05:45 PMEvergreen Ballroom & Foyer
AF5-MoPCharacterization of ALD Films Poster SessionPosterMonday, 05:45 PMEvergreen Ballroom & Foyer
AF1-TuMIn-Situ Characterization of ALD ProcessesOralTuesday, 08:00 AMGrand Ballroom A-C
AF2-TuMALD Precursors IIOralTuesday, 08:00 AMGrand Ballroom H-K
AF3-TuMGrowth and Characterization IIOralTuesday, 08:00 AMGrand Ballroom A-C
AF-TuAPlasma ALD: Growth and CharacterizationOralTuesday, 01:30 PMGrand Ballroom A-C