Area Selective ALD Sessions
(click the Session Code link to see the Abstracts)
Session CodeSessionTypeTimeRoom
AS1-TuMArea-Selective ALD TechniquesOralTuesday, 08:00 AMGrand Ballroom H-K
AS1-TuAArea-Selective ALD by Area-DeactivationOralTuesday, 01:30 PMGrand Ballroom H-K
AS2-TuA1Area-Selective ALD: Combinations with EtchingOralTuesday, 01:30 PMGrand Ballroom H-K
AS2-TuA2Late Breaking AbstractsOralTuesday, 01:30 PMGrand Ballroom H-K
AS-TuPArea Selective ALD Poster SessionPosterTuesday, 05:30 PMEvergreen Ballroom & Foyer