ALD/ALE 2024 Monday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details. Click a Session in the first column to view session papers.
| Session | Monday, August 5, 2024 | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 8:45 AM | 9:45 AM | 10:45 AM | |||||||||||
| PS-MoM |
ALD Welcome and Introductory Remarks
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Opening Remarks: 50 Years of ALD
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ALD: A Disruptive Technology Enabling New Device Architectures
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ALD 2024 Innovator Awardee Talk: To Grow and Not To Grow: Exploring Mechanisms during Atomic Layer Deposition
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Break & Exhibits
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ALE Welcome and Introductory Remarks
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Atomic Layer Precision Process to Enable Advanced Patterning toward High-NA EUV era
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