ALD Fundamentals Sessions
(click the Session Code link to see the Abstracts)
Session CodeSessionTypeTimeRoom
AF1-MoAALD Precursors I & IIOralMonday, 01:30 PMAuditorium
AF2-MoAPlasma Enhanced ALDOralMonday, 01:30 PMJan & Hubert Van Eyck
AF3-MoAALD Growth and Surface ChemistryOralMonday, 01:30 PMJan & Hubert Van Eyck
AF-MoPALD Fundamentals Poster SessionPosterMonday, 05:45 PMArteveldeforum & Pedro de Gante
AF1-TuMALD Mechanisms and ModelingOralTuesday, 08:30 AMJan & Hubert Van Eyck
AF2-TuMConformality of ALDOralTuesday, 08:30 AMJan & Hubert Van Eyck
AF-TuACharacterization I & IIOralTuesday, 01:00 PMJan & Hubert Van Eyck