Atomic Layer Etching Sessions
(click the Session Code link to see the Abstracts)
Session CodeSessionTypeTimeRoom
ALE1-MoAALE of Metals and AlloysOralMonday, 01:30 PMBaekeland
ALE2-MoAALE of Metal OxidesOralMonday, 01:30 PMBaekeland
ALE-MoPAtomic Layer Etching Poster SessionPosterMonday, 05:45 PMArteveldeforum & Pedro de Gante
ALE1-TuMALE Selectivity and AnisotropyOralTuesday, 08:30 AMBaekeland
ALE2-TuMALE for GaN DevicesOralTuesday, 08:30 AMBaekeland
ALE1-TuAALE of Si-based MaterialsOralTuesday, 01:00 PMBaekeland
ALE2-TuANovel ALE Techniques and MaterialsOralTuesday, 01:00 PMBaekeland