ALD/ALE 2026 Wednesday Afternoon
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Wednesday, July 1, 2026 | ||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 1:30 PM | 2:30 PM | 3:30 PM | 4:30 PM | ||||||||||||
| AA-WeA |
Nanolaminate Bragg Reflectors for Acoustic Phonons in the > 100 Ghz Range
|
Next Generation ALD Functionalization of Lead-free MCPs for the Photomultiplier Tube: HRPPD
|
Growing Grass for the Stars: Conformal Nanostructured Ar Coatings for Astronomical Micro-Optics
|
Electrochemical Oxidation of Perfluorobutanoic Acid using ALD Thin Film Electrocatalysts Deposited on Reactive Electrochemical Membranes
|
Development of an Atomic Layer Deposition System for Tritium Permeation Barriers on Arbitrary Geometries
|
Argon Ion Implantation in ALD PbTe Thin Films for Phonon Engineering
|
Multifunctional Hierarchically Restructured Antibacterial Neural Interfacing Electrodes via Plasma-Enhanced Atomic Layer Deposition
|
ALD Al2O3 on Nanocellulose Substrates – Tailoring Barrier and Wetting Properties for Food Packaging
|
BREAK
|
||||||
| AF1-WeA |
A Framework Bridging Generative AI Models and Atomic Layer Deposition for HfxZr1-xO2
|
Quantitative Kinetic Monte Carlo Modeling of Al₂O₃ Atomic Layer Deposition by Trimethylaluminum Based on Neural-Network-Potential-Derived Kinetics
|
Analysis and Design of Nb PE-ALD using Neural Network Potential Molecular Dynamics Simulation
|
Study of Pd Ald as a Growth Enhancer for Ultrathin CoW Liner/Barrier Layer ALD
|
Design and Performance of AI Agents Based on Large Language Models Interfacing with an Autonomous Atomic Layer Deposition Tool
|
Generalized Reaction Networks for Atomic Layer Deposition
|
Active-Learning PES Exploration: Fast Reaction Discovery in ALD Chemistry
|
in-Silico, High-Throughput Exploration of Ald Reaction Mechanisms
|
BREAK
|
||||||
| AF2-WeA |
Validation of the Direct Simulation Monte Carlo Method for the Numerical Modelling of ALD Conformality
|
Multi-Scale Model for Optimization of HfO2 ALD in High Aspect Ratio Structures
|
Engineering the Interlayer Materials to Improve Interfacial Thermal Conductance
|
Closing Remarks and Award Presentations
|
|||||||||||
| AM1-WeA |
Advanced Batch Atomic Layer Deposition Technology for Future 3D Device
|
On-Demand Precursor Delivery for Atomic Layer Deposition Using Machine Learning-Based Feedforward Control of Piezoelectric Valves
|
Design and Flow Optimization of Additively Manufactured Manifolds for Process/Purge Valves in Atomic Layer Deposition
|
Stability of MoCl5 in Heated Canisters and During Delivery
|
Precursor-Driven Morphology Tuning in ZnO Grown by ALD on 8-Inch Wafers
|
Novel Method to Quantify High Surface Area Microloading Effects on Film Conformality
|
High–Aspect–Ratio Integrations: A Path to Full Conformality from HfCl4 and Select Oxidizers
|
BREAK
|
|||||||
| AM2-WeA |
Development and Validation of MoCl5 Delivery Simulations: From Canister to Deposition Chamber
|
Achieving Digital Twin in ALD by Combining AI, Computational Chemistry and Experimental Data
|
Process Window Engineering for Void-Free STI Gap Filling Using Integrated PEALD and Virtual DOE
|
Closing Remarks and Award Presentations in HB Plant Ballroom
|
|||||||||||