ASD 2026 Monday Afternoon
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Monday, March 30, 2026 | |||||||||||||||
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| 1:30 PM | 2:30 PM | 3:30 PM | 4:30 PM | |||||||||||||
| ASD1-MoA |
Atomic-Level Healing and Sculpting: The New Frontier of Area-Selective Deposition in Memory Fabrication
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Establishing High-Temperature Area-Selective Deposition Process of SiN through Controlled Surface Fluorination
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Selective Deposition of HfO2 Films
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GeTe Thickness Profile Alteration by Proximity Effects During Area-Selective Atomic Layer Deposition in Nanotrenches
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Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors in High Aspect Ratios Structures
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Area-Selective Molecular Layer Deposition of Polyamide on EUV Resists versus Si-Based Underlayers for 300 mm Wafer Processing
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BREAK
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| ASD2-MoA |
Development of Area-Selective ALD Processes Using In Situ Optical Diagnostics
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Characterization of Thin and Selective Film Depositions on v-Groove ASD Test Structures
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Co-optimized Process and Metrology Accelerates Molybdenum Contact Development
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Hydrogenolysis of Aniline on Transition Metal Surfaces: Effects of Temperature and Electronic Structure
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Organic Functionalization of H-terminated Si Surfaces to Inhibit Atomic Layer Deposition of Al2O3
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Adsorption Behavior of ALD Precursors on Si, SiO2 and SiN: Simulation and Experimental Investigation
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