ASD 2026 Monday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Monday, March 30, 2026 | |||||||||||||||
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| 8:15 AM | 9:15 AM | 10:15 AM | 11:15 AM | |||||||||||||
| ASD1-MoM |
Welcome and Sponsor Thank Yous
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From Concept to Reality: The Evolution and Impact of Area Selective ALD
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NHC 2.0: Surface-Dependant NHC Activation
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Area Selective Ruthenium Deposition with Dual Inhibitors
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Blocking the Atomic Layer Deposition of Al2O3: Combined Effects of Precursor, Co-reactant, Blocking Molecule, and Reactor Temperature
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BREAK
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| ASD2-MoM |
Enabling Area-Selective Atomic Layer Deposition through Locally Activated and Deactivated Approaches
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Control of Selectivity in SiN ALD Using Hydrazine
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Selective Surface Reactivation of Small-Molecule Inhibitors to Enable Area-Selective Deposition
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Dual-Purpose Catalyst and Inhibitor for Low-Temperature AS-ALD of SiO2 Thin Films
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Octadecylphosphonic Acid Self-Assembled Monolayers for Selective Hardmask Deposition on a Carbon/Metal Oxide System
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Role of Precursor and Aklanethiol Chain Length on Area Selective Deposition of Aluminum and Hafnium-Containing Films
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