ASD 2026 Sunday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Sunday, March 29, 2026
1:00 PM 2:00 PM 3:00 PM 4:00 PM 5:00 PM
TUT1
Direct Self-Assembly (DSA):From Materials to Integration
Selectivity in Plasma Processes
BREAK
Selective Epitaxy Growth of Group IV Materials for CMOS Devices
Selective Thermal Atomic Layer Etching or Spontaneous Etching
Sessions | Time Periods | Topics | Schedule Overview