AVS2003 Sunday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details. Click a Session in the first column to view session papers.
| Session | Sunday, November 2, 2003 | ||||||
|---|---|---|---|---|---|---|---|
| 10:00 AM | 11:00 AM | ||||||
| WS-SuM |
Basic Understanding of Reactive Sputtering Processes
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Shallow Implantation as a Mechanism for Target Poisoning in Reactive Sputtering
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Modeling of Sputtering Equipment and Processes as an Engineering Tool: Building a Virtual Sputter Tool
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