AVS 72 Thursday Afternoon

Combining Optimization and Agentic Control in Automated Scanning Probe Microscopy

Multi-Agent System for Optical Microscopy of 2D Materials Characterization

A Reference Architecture for Complex Scientific Chatbots Based on ChASE, an AI Assistant for SIMS

Leveraging Automated Characterization and Machine Learning to Optimize Defects for Quantum Sensing

Turning RHEED into a Tool for Stoichiometry Analysis and Real-time Control of Epitaxial Film Growth Using Machine Learning

AI-Driven Recognition of RHEED Pattern Features for MBE Monitoring

Toward LLM Driven Agentic Automation of RHEED Diagnostics in Thin Film Deposition

When Growth Has Not Yet Begun: Nucleation and Interface Control in Atomic Layer Deposition

MoO₂Cl₂ as an alternative Mo ALD Precursor for MoS₂ with Improved Thin Film Properties

Impact of Ti Adhesion Layer and ALD Al₂O₃ Thickness on Interfacial Energy Barriers in metal/insulator/metal (MIM) Devices

Evaluation of Barium-Based Precursors for Atomic Layer Deposition of Barium Titanate Thin Films

Deposition of Metastable ZrO₂ Crystalline Films at Low Temperatures by Electron-Enhanced Atomic Layer Deposition (EE-ALD)

Zirconium Phosphate ALD Electrolyte for TiO2-Channeled H+ ECRAM

Unique Optical and Electrical Properties of Ald Deposited Zno on Top of Poly(3-Hexylthiophene)

High-Throughput Silicon ALE via Rapid Matchless Power Modulation

Etching Commercially-Relevant Materials Using Tailored Waveform Biasing

Precise Ion Energy Control Using Advanced Pulse Modulation for Thin Film Deposition and ALD

Characterizing Inductively Coupled Plasmas in Ar/N2/H2 Mixtures for Plasma Enhanced Atomic Layer Deposition of Crystalline Films

Direct Atomic Printing of High-K Dielectric Thin Film Oxide Materials 

Plasma-Enhanced ALD of TaCxN_1-X Tailored for Superconducting Quantum Technologies Through Ion Energy and Other Plasma Control Knobs

Direct Atomic Layer Processing (DALP®): Spatially Localized, Multi-Material Fabrication for Next-Generation Devices from Discovery to Manufacturing

From Plasma to Process: Understanding Dielectric Barrier Discharges for Spatial Atomic Layer Deposition

Designing Materials for High Performance Energy Storage Applications at Solid-Solid and Solid-Liquid Interfaces

Advances in Neutron and X-Ray Imaging and Tomography Methods for in Situ Characterization of Lithium-Ion Batteries at NIST

Solid Electrolyte Interphase Formation between a Li-Metal Anode and an Ionic Liquid Electrolyte Using an Ab Initio Molecular Dynamics Approach

ASSD Student Award Finalist Talk: Strategies for Tof-Sims of Buried Interfaces in Solid Polymer Electrolyte Batteries

Correlative Imaging and Surface Analysis of Air-Sensitive Materials

Correlating Surface Chemistry and Subsurface Structure in Battery Degradation Layers via XPS, HAXPES, AES, and TOF-SIMS

Airless Transfer for Battery Materials: Preserving Native Surface Chemistry for Analysis

Spectroscopic Ellipsometry for Advanced Semiconductor Metrology Applications

In It to Thin It: Spectroscopic Ellipsometry for Native Oxide Measurement on Indium Thermal Interface Materials

Developing an Optical Database of Thermally Evaporated Cadmium Selenide Telluride Alloys for Machine Learning Enhanced Spectroscopic Ellipsometry

Spectroscopic Ellipsometry Studies of Materials for High Power Electronics

Photoacoustic Simulations for Acoustic Critical Dimension Metrology

Optical Modeling of Plasmonic Nanostructures

Engineering Anisotropic Optical Properties in Hybrid Plasmonic Metamaterials

From Disordered Nanoparticles to Periodic Gratings: A Unified Framework for High-Precision Plasmonic Metrology

A Multi-Scale Simulation Methodology for Recipe Design in Semiconductor Etch Processes

GPU-Accelerated AMR Simulation of Charging-Driven Instability in Ion-Assisted Etching

Particle in Cell Monte Carlo Collision Simulations of Capacitive Ar/Cl₂ Discharges

Verification and Validation of the Open-Source Code PICLas for Capacitively Coupled Plasma Discharges in Etching Applications

Fully Kinetic Full-Chamber Modeling of ICP Discharges

Generalized RF Breakdown Surfaces and Avalanche Regimes in Dual-Frequency Argon CCPs: A 2D PIC/MCC Study

Stochasticity in Advanced Plasma Etching

Influence of Nitrogen Addition on Metastable Dynamics in a 2.45 GHz Ar-N₂ Plasmas

In-Situ Raman Spectroscopy of Adaptive Tribological Coatings

Automated Characterization of Combinatorial Thin Films and Their Stress

Designing Defect Structure and Interfacial Strain in an Epitaxial VN Bilayer Film by Tailoring N Concentration

Corrosion Behaviour of Zr-Ti-N Thin Films

High Throughput Thin Film Materials Synthesis via Laser Spike Annealing

Towards Reliable X-Ray Photoelectron Spectroscopy: Understanding Fundamental Differences between Analyses Performed on Samples with and Without Electrical Contact to Spectrometer

Lithography-Free Fabrication of Transparent, Durable Glass Surfaces with Embedded Functional Nanostructures

Restructuring, Fluxionality and Dynamics of Heterogeneous Catalysts in Reaction Conditions from First Principles

Probing Dynamic Catalytic Interfaces: Structure, Evolution, and Function

Site-Specific Deuterium Adsorption in Nitrogen-Doped Graphene and Porous Carbon Materials

Developing a Nanoscopic Understanding of Electronic Metal-Support Interactions: From Model Systems to Powder Catalysts

Reconciling Metal Coordination in g-C₃N₄-based Single Atom Catalysis: A Surface Science Study of Melem-Metal Interactions on Au(111)

Exploring Reactive Oxygen Species for Epoxidation on AgCu Bimetallic Surfaces

Peter Mark Award Talk: Tip-Enhanced Raman Spectroscopy with Scanning Ion-Conductance Microscopy

Vacuum Technology in Cork Science: From Permeability to TCA Desorption

Gas Transport in 3D-Printed Polymers: Linking Microstructure to Outgassing and Permeation Behavior

Study on the Influence of Different Combinations of Roots Pump Sets on Flow Characteristics

NAVAC Vacuum Technology: Old Problems. New Architecture. NAVAC HelixDrive Screw Pumps and NAVAC ShieldDrive Mag-Coupled Rotary Vane Pumps

From Experiment to Grid: A Systems Engineering Approach to Vacuum Pumping Systems in Stellarators

Measuring Rf Surface Resistance of Non-Evaporable Getter Coatings

Feasibility of Turbomolecular Deceleration as an Intrinsic Measurement of System Pressure

Single-Stage Vacuum Pump Performance Measuring Method