AVS 71 Plasma Science and Technology Sessions
Topic Abstract Book
(1 MB, Jun 15, 2025)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name | Room |
|---|---|---|---|
| PS-MoM | Monday, September 22, 2025 8:15 AM | Advanced Logic and EUV Patterning | 201 ABCD W |
| PS-MoA | Monday, September 22, 2025 1:30 PM | Plasma Modelling Focused on CCP | 201 ABCD W |
| PS-TuM | Tuesday, September 23, 2025 8:00 AM | Advanced Memory, HARC, and Cryo Etching | 201 ABCD W |
| PS1-TuA | Tuesday, September 23, 2025 2:15 PM | Plasmas in Advanced Packaging | 201 ABCD W |
| PS2-TuA | Tuesday, September 23, 2025 4:15 PM | Sustainability and Plasmas | 201 ABCD W |
| PS-WeM | Wednesday, September 24, 2025 8:00 AM | Plasma Catalysis and Surface Interactions | 201 ABCD W |
| PS1-WeA | Wednesday, September 24, 2025 2:15 PM | Plasmas for Emerging Device Technologies | 201 ABCD W |
| PS2-WeA | Wednesday, September 24, 2025 3:00 PM | Atmospheric Plasma | 201 ABCD W |
| PS3-WeA | Wednesday, September 24, 2025 4:15 PM | ICP Modelling | 201 ABCD W |
| PS1-ThM | Thursday, September 25, 2025 8:00 AM | Plasma Diagnostics | 201 ABCD W |
| PS2-ThM | Thursday, September 25, 2025 11:00 AM | Plasma Sources | 201 ABCD W |
| PS+AIML-ThA | Thursday, September 25, 2025 2:15 PM | Plasma Modelling AI/ML | 201 ABCD W |
| PS-ThP | Thursday, September 25, 2025 4:30 PM | Plasma Science and Technology Poster Session | Ballroom BC |
| PS1-FrM | Friday, September 26, 2025 8:15 AM | Plasma Processes for Coatings and Thin Films | 201 ABCD W |
| PS2-FrM | Friday, September 26, 2025 9:15 AM | Plasma in EUV Scanner Technology | 201 ABCD W |
| PS3+TF-FrM | Friday, September 26, 2025 10:30 AM | Plasmas and PVD | 201 ABCD W |