AVS 71 Wednesday Morning

High-Temperature Thermal ALD of SiO₂ Using Chlorosilane and Aminosilane Precursors: A Comparative Study

Catalyzed Molecular Layer Deposition of Methylene-Bridged Silicon Oxycarbide and the Effect of Annealing on Molecular Structure and Electrical Properties

The Effect of Precursor Choice and Process Temperature on the Properties of ALD Films

Microwave Enhanced Atomic Layer Deposition (MW-ALD) of HfO₂

In Situ Studies of Ald Hf0.5Zr0.5O₂ by Spectroscopic Ellipsometry and Reflection Absorption Infrared Spectroscopy

Thermal Stability of HfO2 by Incorporating Al2O3 in a MIM Capacitor by 200 mm Batch-ALD

Highly Crystalline ZrO₂ Films under 2 nm by Atomic Layer Modulation

Influence of Molecular Structure on Ruthenium Deposition: An in Situ Study Using Simultaneous Spectroscopic Ellipsometry and Quadrupole Mass Spectrometry

Study on the Thermal Decomposition Behavior of Mo(Co)6 as a Precursor for Mo-ALD

Nucleation Enhancement and Growth Modification in Co-ALD via Pd activation

Process-Structure-Properties of Atomic Layer Deposited Niobium Nitride and Evolution of Strain with Plasma Chemistry

Thin Film Property Modification via Electric Field-Modulated Atomic Layer Deposition

Thin Conductive Cu Films by In-Situ Plasma Post-Reduction of Atomic Layer Deposited CuO

Using X-ray Photoelectron Spectroscopy to Determine Iron Oxidation State in Metamorphic Fe-Ti-oxides, Adirondack Mts, New York

Detection of Low Levels of Oxygen in Reactive Materials by X-Ray Photoelectron Spectroscopy (XPS)

Analysis Related Artefacts in the XPS Studies of MXEnes

Characterizing Oxide Phase Formation in Niobium-Based Superconducting Devices for NASA Astrophysics Missions

Challenges in Next Generation Semiconductor Devices: Insights by Tof-Sims

XPS Investigation of Argon Monoatomic and Gas Cluster Ion Beam Etching of 4H SiC

Low Energy Ion Scattering Analysis of GC/IrO_X /SiO₂ Catalyst Layer Structures

In situ and quasi-in situ characterization techniques for atomic-scale process development in device fabrication: focus on Area Selective Deposition process

Combining ISS, XPS and ion sputtering to discriminate Si-contamination from Si present in the stack of reticles for extreme ultraviolet (EUV) lithography

Using X-Ray Induced Auger Electron Spectroscopy Transitions to Explore the Surface Reactivity of Semi-Conductors

Heterogeneous Chemistry at Liquid-Vapor Interfaces Investigated by X-Ray Photoelectron Spectroscopy

Probing Chemical and Catalytic Interfaces Using Operando Soft X-Ray Spectroscopy

Capturing Electrical Double Layer in Action with Xps on a Graphene Coplanar Capacitor with an Ionic Liquid

Multimodal X-Ray Characterization of Materials Under Reaction Conditions

Ultrathin SiN_X Membrane Stability Under Energy Fluxes from Non-Thermal Plasma Discharges Monitored via Nanocalorimetry

Studying Tungsten and Alloys as Candidate Plasma Facing Material Using ToF-SIMS

ToF-SIMS Acquisition Multiplexing - Concept, Applications, and Data Analysis

Diamond Surface Analysis for Electronics and Quantum Applications

ToF-SIMS Spectral Analysis Using Python

Progress in Wide and Ultra-Wide Bandgap Semiconductors – Energy Implications

Limitations and Effects of Heavy Metal Doping in GaN

Using Raman Spectroscopy to Characterize Stress and Strain in SiC

Nanoscale GaN Vacuum Electron Devices

Combining CVD of Graphene and SiC for Efficient Layer Transfer

Multiscale Modeling of Self-heating Effects in AlGaN/GaN High Electron Mobility Transistors (HEMT)

Atomic Layer Deposition of High-k Oxide Layers on Aluminum Gallium Nitride: Insight from Time-Resolved Synchrotron Studies

Ga₂O₃ Polymorphs: Epitaxial Film Growth, Characterization and Contacts

Compensating Interfacial Parasitic Si Channels in β-Ga2O3 Thin Films Via Fe δ-doping

Investigating Metal Gate-Driven Interfacial Reactions in ALD-Grown Al₂O₃ on β-Ga₂O₃

The Impact of Plasma Enhancement Gasses on Hydrogen Superpermeation Through Palladium Alloy Metal Foil Pumps

The Impact of Contaminants on Superpermeation Through Palladium Alloy Metal Foil Pumps

Elucidating Complex Interactions in Non-Thermal Plasma-Assisted Reactions on (Supported) Porous Catalysts

in Situ/Operando Diagnostics of Liquids and Catalysts in Contact with Plasmas

Catalytic Deconstruction Product Tunability Through Atmospheric Air Plasma Pre-Treatment

Gas-Phase Plasma Synthesis as a Method for Producing Nanomaterials with Special Properties

Interaction of Etching Plasmas with Polyurea Films deposited by Molecular Layer Deposition for Surface and Sidewall Passivation

Characterization and Operation of a 2-D Plasma Reactor for Methane Pyrolysis

Tools for High-Throughput Autonomous Materials Discovery and Development for the Surface Engineer

Hydrophobic and Hydrophilic Metallic Coatings: Their Sputter Depositions and Applications

Surface Engineering of Organic Nm-Thick PEDOT:PSS Films for Enhanced Electrical Conductivity

Atomic Oxygen-Resistant Metal Oxide Coatings for Space Operations in Low-Earth Orbit

Reducing Tribological Run-in Through Morphology Control: A Dual-Layer Approach for Improved Environmental Insensitivity and Tribological Performance

Optimizing Low-temperature MAX-phase Ti₂AlN Synthesis in Reactive TiAlN Multi-layer Thin Films

Design of 2D Material-Based Coatings for Superlubricity in Sliding and Rolling Contacts

Physics of Sample Charging During X-Ray Photoelectron Spectroscopy: Insights from Experiments with Thin Film Insulators

Femtosecond Laser Ablation (fs-LA) XPS Depth Profiling for Surface Engineering

In Situ SEM Study of Graphene Rheotaxy: Growth on Molten Metals

Optical Metasurfaces in Iridium for High-Temperature Applications

On-Surface Synthesis of Planar/Nonplanar Porous Graphene Nanoribbons and Nanosheets

In situ XPS Study of Pt-Grafted g-C3N4 as a Water-Splitting Photocatalyst

Applying Gas Phase Ion Imaging Methods to Study Chemical Reactivity on Surfaces

DFT study of Transition-Metal Doping in Ni(OH)₂/NiOOH Catalysts for Enhanced Urea Oxidation

Visualizing Self-Metalation Mediated Cyclodehydrogenation of a Nonplanar Tetrabenzoporphyrin Molecule by Tip-Enhanced Raman Spectroscopy

Band Engineering Low Energy States in 1D and 2D Carbon Nanomaterials

On-Surface Synthesis and Single-Molecule Manipulation for the Atomically Precise Fabrication of Carbon Nanomaterials

Impact of Subsurface Oxygen on CO Oxidation over Rhodium Surfaces

Structural Elucidation of Intermediates in the Selective Epoxidation Reaction of Ethylene on Ag(111) and NiAg(111)

Metal-Oxide Interfaces and Their Role in Methane Conversion to Fuels

Vapor-Phase Deposited Functional Polymer Films for Electronics and Biomedical Device Applications

Surface Initiated Layer Deposition: A New Chemical Vapor Deposition Process That Challenges the Limits of Polymeric Coating Conformality

Recent Advances in the Understanding of Spontaneous Orientation Polarization in Polymer Thin Films Deposited by Initiated Chemical Vapor Deposition (iCVD)

Surface Roughness Control in Vapor-Deposited Nanocoatings for Bio-Adhesion Mitigation

Precision Synthesis of Polymeric Materials Using initiated Chemical Vapor Deposition (iCVD) for Cyber Manufacturing

PFAS-free initiators for iCVD

Ozone-Initiated Oxidative Chemical Vapor Deposition of PEDOT Coatings on 2D and 3D Substrates

Oxidative Chemical Vapor Deposition of Nanometer-Scale Polyaniline on Si/Cobalt Phthalocyanine (CoPc) Photocathodes for Enhanced Stability and CO/H₂ Selectivity during Photoelectrochemical CO₂ Reduction

Temperature Effects in Oxidative Molecular Layer Deposition (oMLD) of Polypyrrole

Oxidative Molecular Layer Deposition of Polythiourea for Nitrate Sensing

Polyurea Molecular Layer Deposition Using Low Melting Point Precursors for Use in Biosensor Design