AVS 72 Atomic Scale Processing Mini-Symposium Sessions

Topics | Time Periods | Schedule Overview

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Session Code Start Session Name Room
AP+EL+EM+PS+TF-TuM Tuesday, November 10, 2026 8:00 AM Area Selective Processing and Patterning 316
AP2+EL+PS+TF-TuA Tuesday, November 10, 2026 4:45 PM Advancing X-Ray Photoelectron Spectroscopy to enable Atomic Scale Processing 316
AP1+EL+MS+PS+TF-TuA Tuesday, November 10, 2026 2:15 PM Advanced Atomic Scale Processing through Modeling and Simulation 316
AP+EL+PS+TF-WeM Wednesday, November 11, 2026 8:00 AM Thermal and Plasma Enhanced Atomic Layer Etching 316
AP+2D+EL+EM+PS+TF-WeA Wednesday, November 11, 2026 2:15 PM Atomic Scale Processing to Enable 2D Materials 316
AP+EL+MS+PS+TF-ThM Thursday, November 12, 2026 8:00 AM Advancing Spectroscopic Ellipsometry and Other in-Situ Techniques to Enable Atomic Scale Processing 316
AP+EL+MS+PS+TF-ThA Thursday, November 12, 2026 2:15 PM Advancing Atomic Scale Processing Through Novel Sources and Pulsing Methods 316
AP+EL+PS+TF-ThP Thursday, November 12, 2026 4:30 PM Atomic Scale Processing Mini-Symposium Poster Session Ballroom A
AP1+EL+PS+TF-FrM Friday, November 13, 2026 8:15 AM Thermal and Plasma-Enhanced ALD 316
AP2+EL+PS+TF-FrM Friday, November 13, 2026 10:30 AM Enabling Atomic Scale Processing (ALD/ALE) by leveraging new Precursors and Surface Reactions 316
Topics | Time Periods | Schedule Overview