AVS 72 Atomic Scale Processing Mini-Symposium Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name | Room |
|---|---|---|---|
| AP+EL+EM+PS+TF-TuM | Tuesday, November 10, 2026 8:00 AM | Area Selective Processing and Patterning | 316 |
| AP2+EL+PS+TF-TuA | Tuesday, November 10, 2026 4:45 PM | Advancing X-Ray Photoelectron Spectroscopy to enable Atomic Scale Processing | 316 |
| AP1+EL+MS+PS+TF-TuA | Tuesday, November 10, 2026 2:15 PM | Advanced Atomic Scale Processing through Modeling and Simulation | 316 |
| AP+EL+PS+TF-WeM | Wednesday, November 11, 2026 8:00 AM | Thermal and Plasma Enhanced Atomic Layer Etching | 316 |
| AP+2D+EL+EM+PS+TF-WeA | Wednesday, November 11, 2026 2:15 PM | Atomic Scale Processing to Enable 2D Materials | 316 |
| AP+EL+MS+PS+TF-ThM | Thursday, November 12, 2026 8:00 AM | Advancing Spectroscopic Ellipsometry and Other in-Situ Techniques to Enable Atomic Scale Processing | 316 |
| AP+EL+MS+PS+TF-ThA | Thursday, November 12, 2026 2:15 PM | Advancing Atomic Scale Processing Through Novel Sources and Pulsing Methods | 316 |
| AP+EL+PS+TF-ThP | Thursday, November 12, 2026 4:30 PM | Atomic Scale Processing Mini-Symposium Poster Session | Ballroom A |
| AP1+EL+PS+TF-FrM | Friday, November 13, 2026 8:15 AM | Thermal and Plasma-Enhanced ALD | 316 |
| AP2+EL+PS+TF-FrM | Friday, November 13, 2026 10:30 AM | Enabling Atomic Scale Processing (ALD/ALE) by leveraging new Precursors and Surface Reactions | 316 |